| Presentation | 1994/11/24 Evaluation of a bonding interface on a direct bonded wafer with contactless LBIC method Yuji Yamaguchi, Shun-ichiro Ishigami, Akira Usami, Kazunori Matsuki, Tsutomu Takeuchi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We evaluated a direct bonded wafer by a contactless laser beam induced current, conductivity(LBIC)method.Using the focused laser beam,many regions in which LBIC signal intensity and lifetime were degraded were observed.These regions are about 1mm in diameter. Some defects that act as a recombination center will exist in these regions.The variations in LBIC signalintensity were more significant than that in primary mode lifetime. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | direct bonded wafer / lifetime / contactless LBIC method / defect region |
| Paper # | SDM94-131 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1994/11/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation of a bonding interface on a direct bonded wafer with contactless LBIC method |
| Sub Title (in English) | |
| Keyword(1) | direct bonded wafer |
| Keyword(2) | lifetime |
| Keyword(3) | contactless LBIC method |
| Keyword(4) | defect region |
| 1st Author's Name | Yuji Yamaguchi |
| 1st Author's Affiliation | Department of Electrical and Computer Engineering,Nagoya Institute of Technology() |
| 2nd Author's Name | Shun-ichiro Ishigami |
| 2nd Author's Affiliation | Mitsubishi Materials |
| 3rd Author's Name | Akira Usami |
| 3rd Author's Affiliation | Mitsubishi Materials |
| 4th Author's Name | Kazunori Matsuki |
| 4th Author's Affiliation | Dainippon Screen Manufacturing. |
| 5th Author's Name | Tsutomu Takeuchi |
| 5th Author's Affiliation | Dainippon Screen Manufacturing. |
| Date | 1994/11/24 |
| Paper # | SDM94-131 |
| Volume (vol) | vol.94 |
| Number (no) | 366 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |