| Presentation | 1994/11/24 Secondary grain growth of poly-Si by high temperature annealing Weifeng Qu, Makoto Kugenuma, Yuichi Masaki, Yoshio Kakimoto, Akio Kitagawa, Masakuni Suzuki, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Secondary grain growth(S.G.G)of(110)-or(100)-oriented poly-Si films has been studied using flat gas flame from the viewpoint of crystallographic orientaions.For(110)-oriented and randomly oriented samples,X-ray diffraction intensities of(111)plane increased and those from(311)and(110)planes decreased by annealing at high temperaure.On the other hand,X-ray diffraction of(100) plane increased and(111),(110)and(311)decreased for(100)-oriented samples.These results are not in agreement with those of previous studies.Preferential S.G.G are discussed,based on interface energy consideration. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Raman Imaging / Recrystallized silicon layer / Detection of defect |
| Paper # | SDM94-129 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1994/11/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Secondary grain growth of poly-Si by high temperature annealing |
| Sub Title (in English) | |
| Keyword(1) | Raman Imaging |
| Keyword(2) | Recrystallized silicon layer |
| Keyword(3) | Detection of defect |
| 1st Author's Name | Weifeng Qu |
| 1st Author's Affiliation | Department of Electrical and Computer Engineering,Faculty of Technology,Kanazawa University() |
| 2nd Author's Name | Makoto Kugenuma |
| 2nd Author's Affiliation | Department of Electrical and Computer Engineering,Faculty of Technology,Kanazawa University |
| 3rd Author's Name | Yuichi Masaki |
| 3rd Author's Affiliation | Department of Electrical and Computer Engineering,Faculty of Technology,Kanazawa University |
| 4th Author's Name | Yoshio Kakimoto |
| 4th Author's Affiliation | Department of Electrical and Computer Engineering,Faculty of Technology,Kanazawa University |
| 5th Author's Name | Akio Kitagawa |
| 5th Author's Affiliation | Department of Electrical and Computer Engineering,Faculty of Technology,Kanazawa University |
| 6th Author's Name | Masakuni Suzuki |
| 6th Author's Affiliation | Department of Electrical and Computer Engineering,Faculty of Technology,Kanazawa University |
| Date | 1994/11/24 |
| Paper # | SDM94-129 |
| Volume (vol) | vol.94 |
| Number (no) | 366 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |