| Presentation | 1994/5/27 An SOI-DRAM with Wide Operating Voltage Range by CMOS/SIMOX Technology Katsuhiro Suma, Takahiro Tsuruda, Fukashi Morishita, Hideto Hidaka, Masakazu Hirose, Yasuo Yamaguchi, Takahisa Eimori, Tadashi Nishimura, Kazutami Arimoto, Kazuyasu Fujishima, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | An SOI-DRAM test device with 0.5μm CMOS, SIMOX technology is suc cessfully fabricated for the first time.The access time and operating voltage range are improved compared with the reference Bulk-Si DRAM.These enhanced chip performance indicate that the DRAM/SIMOX technology corresponds to one generation ahead of the equivalent DRAM/Bulk-Si technology. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SOI-DRAM / Partially depleyed T r. / Body contact / Floating body effect / Low voltage DRAM |
| Paper # | SDM94-28,ICD94-39 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1994/5/27(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | An SOI-DRAM with Wide Operating Voltage Range by CMOS/SIMOX Technology |
| Sub Title (in English) | |
| Keyword(1) | SOI-DRAM |
| Keyword(2) | Partially depleyed T r. |
| Keyword(3) | Body contact |
| Keyword(4) | Floating body effect |
| Keyword(5) | Low voltage DRAM |
| 1st Author's Name | Katsuhiro Suma |
| 1st Author's Affiliation | ULSI Laboratory,Mitsubishi Electric Corporation() |
| 2nd Author's Name | Takahiro Tsuruda |
| 2nd Author's Affiliation | ULSI Laboratory,Mitsubishi Electric Corporation |
| 3rd Author's Name | Fukashi Morishita |
| 3rd Author's Affiliation | ULSI Laboratory,Mitsubishi Electric Corporation |
| 4th Author's Name | Hideto Hidaka |
| 4th Author's Affiliation | ULSI Laboratory,Mitsubishi Electric Corporation |
| 5th Author's Name | Masakazu Hirose |
| 5th Author's Affiliation | Daioh Electric Co. |
| 6th Author's Name | Yasuo Yamaguchi |
| 6th Author's Affiliation | ULSI Laboratory,Mitsubishi Electric Corporation |
| 7th Author's Name | Takahisa Eimori |
| 7th Author's Affiliation | ULSI Laboratory,Mitsubishi Electric Corporation |
| 8th Author's Name | Tadashi Nishimura |
| 8th Author's Affiliation | ULSI Laboratory,Mitsubishi Electric Corporation |
| 9th Author's Name | Kazutami Arimoto |
| 9th Author's Affiliation | ULSI Laboratory,Mitsubishi Electric Corporation |
| 10th Author's Name | Kazuyasu Fujishima |
| 10th Author's Affiliation | Kitaitami Works,Mitsubishi Electric Corporation |
| Date | 1994/5/27 |
| Paper # | SDM94-28,ICD94-39 |
| Volume (vol) | vol.94 |
| Number (no) | 73 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |