| Presentation | 1994/10/19 Mechanism and prevention methods of resist pattern collapse Toshihiko Tanaka, Mitsuaki Morigami, Hiroaki Oizumi, Nobufumi Atoda, Shou-ichi Uchino, Taro Ogawa, Takashi Soga, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The mechanism of resist pattern collapse,which is a crucial problem in microlithography,is investigated,and the prevention methods of the collapse are proposed.Resist pattern collapse occurred in the rinse liquid drying process,and the force acting between patterns was cohesive.From these facts,it was led that the origin of the collapse force was surface tension of the rinse liquid.As resist pattern collapse prevention methods,low surface tension rinse,freeze drying and the resist hardening in rinse were proposed and the effectiveness of these methods was experimentally confirmed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Lithography / Resist / Development / Resist pattern collapse |
| Paper # | SDM94-108 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1994/10/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Mechanism and prevention methods of resist pattern collapse |
| Sub Title (in English) | |
| Keyword(1) | Lithography |
| Keyword(2) | Resist |
| Keyword(3) | Development |
| Keyword(4) | Resist pattern collapse |
| 1st Author's Name | Toshihiko Tanaka |
| 1st Author's Affiliation | Central Research Laboratory,Hitachi() |
| 2nd Author's Name | Mitsuaki Morigami |
| 2nd Author's Affiliation | SORTEC |
| 3rd Author's Name | Hiroaki Oizumi |
| 3rd Author's Affiliation | SORTEC |
| 4th Author's Name | Nobufumi Atoda |
| 4th Author's Affiliation | SORTEC |
| 5th Author's Name | Shou-ichi Uchino |
| 5th Author's Affiliation | Central Research Laboratory,Hitachi |
| 6th Author's Name | Taro Ogawa |
| 6th Author's Affiliation | Central Research Laboratory,Hitachi |
| 7th Author's Name | Takashi Soga |
| 7th Author's Affiliation | Central Research Laboratory,Hitachi |
| Date | 1994/10/19 |
| Paper # | SDM94-108 |
| Volume (vol) | vol.94 |
| Number (no) | 282 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |