| Presentation | 1999/2/15 Analysis of Decomposed Layer Appearing on the Surface of Barium Strontium Titanate Yoshihisa Fujisaki, Yasuhiro Shimamoto, Kazuyoshi Torii, Yuichi Matsui, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Chemical states and structures of thin degenerated layers grown on the surface of (Ba,Sr)TiO_3(BST) films are investigated by X-ray photoelectron spectroscopy (XPS). It was found that decomposition occurred as a result of the air exposure and also as a result of annealing. A careful study of a Ba 3d peak in the XPS spectrum reveals that Ba in BST crystal easily decomposes out of the perovskite phase and makes BaCO_3 or barium oxides, whereas no significant change occurs in Sr, or Ti oxides. This degenerated layer can be removed by nitric acid treatment. It was also found that the surface BST becomes rather stable against exposure to air compared with the original one after the nitric acid treatment. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | BST / XPS / decomposition / nitric acid / surface treatment / humidity |
| Paper # | ED98-244 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1999/2/15(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Analysis of Decomposed Layer Appearing on the Surface of Barium Strontium Titanate |
| Sub Title (in English) | |
| Keyword(1) | BST |
| Keyword(2) | XPS |
| Keyword(3) | decomposition |
| Keyword(4) | nitric acid |
| Keyword(5) | surface treatment |
| Keyword(6) | humidity |
| 1st Author's Name | Yoshihisa Fujisaki |
| 1st Author's Affiliation | Central Research Laboratory, Hitachi Ltd.() |
| 2nd Author's Name | Yasuhiro Shimamoto |
| 2nd Author's Affiliation | Central Research Laboratory, Hitachi Ltd. |
| 3rd Author's Name | Kazuyoshi Torii |
| 3rd Author's Affiliation | Central Research Laboratory, Hitachi Ltd. |
| 4th Author's Name | Yuichi Matsui |
| 4th Author's Affiliation | Central Research Laboratory, Hitachi Ltd. |
| Date | 1999/2/15 |
| Paper # | ED98-244 |
| Volume (vol) | vol.98 |
| Number (no) | 592 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |