| Presentation | 1999/2/15 Dependence of electric properties of the SBT capacitor on the bottom electrode materials T. EShita, K. Nakamura, H. Yamawaki, S. Miyagaki, Y. Arimoto, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We examined the dependence of electric properties of the SBT(SrBi_2Ta_2O_9) capacitor on the bottom electrode materials. In the MOD (metal organic decomposition) method, SBT capacitor with Pt/TiO_2 bottom electrode has better polarization characteristics than that with Pt/Ti bottom electrode since Ti diffusion into SBT layer in the SBT/Pt/TiO_2 is found to be much less than that in the SBT/Pt/Ti. / Electric properties of the SBT capacitor with Ir or IrO_2 bottom electrode is also proven to be simillar to those of the SBT capacitor with Pt/TiO_2 bottom electrode. Although Bi defficiency is found near the bottom conventional Pt electrode in the CVD(chemical vapor depotition) SBT capacitor, Bi diffisiency can be prevented by using IrO_2 bottom electrode. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | FeRAM / SBT / SrBi_2Ta_2O_9 / bottom electrode / MOD / liquid source CVD |
| Paper # | ED98-242 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1999/2/15(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Dependence of electric properties of the SBT capacitor on the bottom electrode materials |
| Sub Title (in English) | |
| Keyword(1) | FeRAM |
| Keyword(2) | SBT |
| Keyword(3) | SrBi_2Ta_2O_9 |
| Keyword(4) | bottom electrode |
| Keyword(5) | MOD |
| Keyword(6) | liquid source CVD |
| 1st Author's Name | T. EShita |
| 1st Author's Affiliation | Fujitsu Laboratories Ltd.() |
| 2nd Author's Name | K. Nakamura |
| 2nd Author's Affiliation | Fujitsu Laboratories Ltd. |
| 3rd Author's Name | H. Yamawaki |
| 3rd Author's Affiliation | Fujitsu Laboratories Ltd. |
| 4th Author's Name | S. Miyagaki |
| 4th Author's Affiliation | Fujitsu Laboratories Ltd. |
| 5th Author's Name | Y. Arimoto |
| 5th Author's Affiliation | Fujitsu Laboratories Ltd. |
| Date | 1999/2/15 |
| Paper # | ED98-242 |
| Volume (vol) | vol.98 |
| Number (no) | 592 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |