| Presentation | 1998/10/22 Estimation of SPICE Parameter Fluctuations using In-Line Measurements : Application to High-Speed BiCMOS Process Yasunori Iwatsu, Seijiro Moriyama, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We identified in-line measurement items which can monitor fluctuations of high speed BiCMOS SPICE parameters and built response surface model(RSM). Using principal component analysis(PCA), RSM was derived by Monte Carlo simulation result including calibrated process/device simulation and SPICE parameter extraction. Thus, circuit designers can obtain information of production line fluctuations more accurately. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SPICE Parameter / Statistical Analysis / RSM / TCAD / Calibaration |
| Paper # | VLD98-76,ED98-101,SDM98-137,ICD98-207 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1998/10/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Estimation of SPICE Parameter Fluctuations using In-Line Measurements : Application to High-Speed BiCMOS Process |
| Sub Title (in English) | |
| Keyword(1) | SPICE Parameter |
| Keyword(2) | Statistical Analysis |
| Keyword(3) | RSM |
| Keyword(4) | TCAD |
| Keyword(5) | Calibaration |
| 1st Author's Name | Yasunori Iwatsu |
| 1st Author's Affiliation | System LSI Division, Semiconductor Group, Toshiba Corporation.() |
| 2nd Author's Name | Seijiro Moriyama |
| 2nd Author's Affiliation | System LSI Division, Semiconductor Group, Toshiba Corporation. |
| Date | 1998/10/22 |
| Paper # | VLD98-76,ED98-101,SDM98-137,ICD98-207 |
| Volume (vol) | vol.98 |
| Number (no) | 349 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |