| Presentation | 1998/10/22 Impact of Statistical and Defect Analysis on Fast Yield Ramp Up Toru Kaga, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper describes the yield goal setting, understanding current yield management method, and systematic yield analysis and yield improvement method for high-speed yield ramp up. Among these components the paper focuses on the systematic yield analysis method, e.g., Ys(systematic yield component) and Yr(random yield component)extraction, and an optimum methodology for reducing each yield components. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Yield goal / yield ramp up / systematic yield analysis / systematic yield component / random yield component |
| Paper # | VLD98-73,ED98-98,SDM98-134,ICD98-204 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 1998/10/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Impact of Statistical and Defect Analysis on Fast Yield Ramp Up |
| Sub Title (in English) | |
| Keyword(1) | Yield goal |
| Keyword(2) | yield ramp up |
| Keyword(3) | systematic yield analysis |
| Keyword(4) | systematic yield component |
| Keyword(5) | random yield component |
| 1st Author's Name | Toru Kaga |
| 1st Author's Affiliation | KLA-Tencor Japan Ltd.() |
| Date | 1998/10/22 |
| Paper # | VLD98-73,ED98-98,SDM98-134,ICD98-204 |
| Volume (vol) | vol.98 |
| Number (no) | 349 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |