| Presentation | 1998/8/20 Tight-binding Molecular Dynamics Simulation on the Desorption Process of SiO Molecule during the Oxidation of Si Surface Aruba Yamada, Akira Endou, Hiromitsu Takaba, Kazuo Teraishi, Momoji Kubo, S.Salai C. Ammal, Akira Miyamoto, Masahiro Kitajima, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In order to fabricate more integrated MOS devices, it is necessary to control oxidation reactions mof Si surface on an atomic level. It is well known that the oxidation reaction of Si surface greatly depends on the temperature and pressure. At the low temperature (T<900K) SiO_2 film is formed and the high temperature (T>900K) leads to SiO gas formation. Recently Kitajima et al. reported the vibrational and rotational distribution of desorbed SiO molecule from the Si surface and elucidated that SiO molecule desorbed at thermal equilibrium state. In this study we applied our tight-binding molecular dynamics code to investigate the dynamics of SiO desorption process from the Si surface. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Tight-binding molecular dynamics / SiO desorption |
| Paper # | SDM98-118 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1998/8/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Tight-binding Molecular Dynamics Simulation on the Desorption Process of SiO Molecule during the Oxidation of Si Surface |
| Sub Title (in English) | |
| Keyword(1) | Tight-binding molecular dynamics |
| Keyword(2) | SiO desorption |
| 1st Author's Name | Aruba Yamada |
| 1st Author's Affiliation | Graduate School of Engineering, Tohoku University() |
| 2nd Author's Name | Akira Endou |
| 2nd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 3rd Author's Name | Hiromitsu Takaba |
| 3rd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 4th Author's Name | Kazuo Teraishi |
| 4th Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 5th Author's Name | Momoji Kubo |
| 5th Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 6th Author's Name | S.Salai C. Ammal |
| 6th Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 7th Author's Name | Akira Miyamoto |
| 7th Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 8th Author's Name | Masahiro Kitajima |
| 8th Author's Affiliation | National Research Institute for Metals |
| Date | 1998/8/20 |
| Paper # | SDM98-118 |
| Volume (vol) | vol.98 |
| Number (no) | 242 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |