| Presentation | 1998/12/10 Analysis of Direct Tunneling of Thin SiO_2 Film N MIURA, N MATSUO, J YAMAUCHI, Y KITAGAWA, T MIYOSHI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The direct tunneling(DT) conduction in the low voltage range for the thermal SiO_2 with a thickness of 2.7～3.3mm formed on p-Si(100) substrate is examined considering the reverse DT current which flows from the low potential electrode to the high potential electrode. The phenomenon that the decrease ratio of the DT current in the range of 0～0.5V increases was clarified. However, there is still a difference of the DT current of one order at maximum between the measured and the calculated data. Consideration of Si multi-folded valleys reproduces the measured DT current in the low voltage range. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | thin SiO_2 film / direct tunneling / the low voltage / reverse DT current / Si multi-folded valleys |
| Paper # | SDM98-174 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 1998/12/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Analysis of Direct Tunneling of Thin SiO_2 Film |
| Sub Title (in English) | |
| Keyword(1) | thin SiO_2 film |
| Keyword(2) | direct tunneling |
| Keyword(3) | the low voltage |
| Keyword(4) | reverse DT current |
| Keyword(5) | Si multi-folded valleys |
| 1st Author's Name | N MIURA |
| 1st Author's Affiliation | Department of Electrical & Electronic Engineering, Yamaguchi University() |
| 2nd Author's Name | N MATSUO |
| 2nd Author's Affiliation | Department of Electrical & Electronic Engineering, Yamaguchi University |
| 3rd Author's Name | J YAMAUCHI |
| 3rd Author's Affiliation | Department of Electrical & Electronic Engineering, Yamaguchi University |
| 4th Author's Name | Y KITAGAWA |
| 4th Author's Affiliation | Department of Electrical & Electronic Engineering, Yamaguchi University |
| 5th Author's Name | T MIYOSHI |
| 5th Author's Affiliation | Department of Electrical & Electronic Engineering, Yamaguchi University |
| Date | 1998/12/10 |
| Paper # | SDM98-174 |
| Volume (vol) | vol.98 |
| Number (no) | 445 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |