Presentation | 1998/5/21 Growth of GaInSb Bulk Alloy from Ternary Solution Akira Tanaka, Tsuyoshi Yoneyama, Mitsunori Yagi, Masakazu Kimura, Tokuzo Sukegawa, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | In order to advance Iattice-matched devices, alloy substrates with a desired lattice constant are demanded. In this paper, the solute-feeding Czochralski method developed for the growth of homogeneous bulk alloys is applied to the growth of GaInSb alloy from Ga-In-Sb solution. By adjusting the growth condition so as to suppress the influence of thermal fluctuation on alloy composition, a GaInSb alloy with InSb content of about 0.6 was successfully pulled. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | GaInSb alloy / Czochralski method / solution growth |
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Committee | SDM |
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Conference Date | 1998/5/21(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Registration To | Silicon Device and Materials (SDM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Growth of GaInSb Bulk Alloy from Ternary Solution |
Sub Title (in English) | |
Keyword(1) | GaInSb alloy |
Keyword(2) | Czochralski method |
Keyword(3) | solution growth |
1st Author's Name | Akira Tanaka |
1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
2nd Author's Name | Tsuyoshi Yoneyama |
2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
3rd Author's Name | Mitsunori Yagi |
3rd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
4th Author's Name | Masakazu Kimura |
4th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
5th Author's Name | Tokuzo Sukegawa |
5th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
Date | 1998/5/21 |
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Volume (vol) | vol.98 |
Number (no) | 63 |
Page | pp.pp.- |
#Pages | 5 |
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