| Presentation | 1998/4/24 Fabrication and characterization of 14-nm-gate-length EJ-MOSFETs Hisao Kawaura, Toshitsugu Sakamoto, Yukinori Ochiai, Jun'ichi Fujita, Toshio Baba, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have fabricated Electrically variable shallow Junction MOSFETs(EJ-MOSFETs)with electrically induced ultrashallow source/drain regions to investigate transistor characteristics and physical phenomena in ultra-fine gate MOSFETs.By using electron-beam direct writing on an ultra-high resolution negative resist(calixarene), we could achive a ultrafine gate length of 14 nm.Although we observed the large leakage current at the gate length less than 20 nm, we confirmed the room-temperature transistor operation of the 14-nm-gate-length device.The leakage current was not caused by quantum mechanical processes but by classical thermal processes. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | EJ-MOSFET / silicon / calixarene / short-channel effects / ultra-fine gate |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1998/4/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication and characterization of 14-nm-gate-length EJ-MOSFETs |
| Sub Title (in English) | |
| Keyword(1) | EJ-MOSFET |
| Keyword(2) | silicon |
| Keyword(3) | calixarene |
| Keyword(4) | short-channel effects |
| Keyword(5) | ultra-fine gate |
| 1st Author's Name | Hisao Kawaura |
| 1st Author's Affiliation | Fundamental Research Labs., NEC Corporation() |
| 2nd Author's Name | Toshitsugu Sakamoto |
| 2nd Author's Affiliation | Fundamental Research Labs., NEC Corporation |
| 3rd Author's Name | Yukinori Ochiai |
| 3rd Author's Affiliation | Silicon Systems Research Labs., NEC Corporation |
| 4th Author's Name | Jun'ichi Fujita |
| 4th Author's Affiliation | Fundamental Research Labs., NEC Corporation |
| 5th Author's Name | Toshio Baba |
| 5th Author's Affiliation | Fundamental Research Labs., NEC Corporation |
| Date | 1998/4/24 |
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| Volume (vol) | vol.98 |
| Number (no) | 31 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |