Presentation 1998/4/23
Electrical Conduction of Double-Barrier Ultrasmall MOS Transistors
Tsuyoshi HATANO, Akihiro NOMURA, Masayoshi YOSHIDA, Anri NAKAJIMA, Kentaro SHIBAHARA, Shin YOKOYAMA,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Novel ultrasmall MOS transistors with double potential barriers are proposed.The structure is similar to the LDD (Lightly Doped Drain) MOS transistors with two gates.The double potential barriers are formed under the side wall spacers, which are controlled by the upper gate voltage.It is necessary that the double potential barriers, through which the tunneling current is larger than the thermal excited current, is formed, in order to operate at room temperature.It is confirmed that the double potential barriers are formed.The tunnelng current is suppressed in the vicinity of zero drain voltage by the Coulomb blockade effect.The thermal excited current is smaller than the tunneling current when high substrate doping concentration is employed.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) depletion-layer barrier / room temperature Coulomb blockade / tunneling current / thermal excited current / substrate doping concentration
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Committee SDM
Conference Date 1998/4/23(1days)
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Registration To Silicon Device and Materials (SDM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Electrical Conduction of Double-Barrier Ultrasmall MOS Transistors
Sub Title (in English)
Keyword(1) depletion-layer barrier
Keyword(2) room temperature Coulomb blockade
Keyword(3) tunneling current
Keyword(4) thermal excited current
Keyword(5) substrate doping concentration
1st Author's Name Tsuyoshi HATANO
1st Author's Affiliation Reserch Center for Nanodevices and Systems, Hiroshima University()
2nd Author's Name Akihiro NOMURA
2nd Author's Affiliation Reserch Center for Nanodevices and Systems, Hiroshima University
3rd Author's Name Masayoshi YOSHIDA
3rd Author's Affiliation Reserch Center for Nanodevices and Systems, Hiroshima University
4th Author's Name Anri NAKAJIMA
4th Author's Affiliation Reserch Center for Nanodevices and Systems, Hiroshima University
5th Author's Name Kentaro SHIBAHARA
5th Author's Affiliation Reserch Center for Nanodevices and Systems, Hiroshima Univeristy
6th Author's Name Shin YOKOYAMA
6th Author's Affiliation Reserch Center for Nanodevices and Systems, Hiroshima University
Date 1998/4/23
Paper #
Volume (vol) vol.98
Number (no) 30
Page pp.pp.-
#Pages 5
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