| Presentation | 1993/12/9 Transient Phase Diagram for a-Si in Rapid Thermal Processes Akio Kitagawa, Masakuni Suzuki, Lin Huang, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In the phase transition involvmg non-equilibrium phases,the transition temperature is a function of the heating or cooling rate.The heating rate dependent transition temperature was calailated numerically from the temperature dependence of the incubation period for nucleation of the new phase.In addition,a model of the glass transition in a-Si was developed.The results are summarized in ′Transient Phase Diagram′ that is,a phase diagr am describing transient phase and their transition temperatures as a function of the heafang rate. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | amorphous silicon / crystallization / incubation period / supercooled liquid / glass transition |
| Paper # | SDM93-153 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1993/12/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Transient Phase Diagram for a-Si in Rapid Thermal Processes |
| Sub Title (in English) | |
| Keyword(1) | amorphous silicon |
| Keyword(2) | crystallization |
| Keyword(3) | incubation period |
| Keyword(4) | supercooled liquid |
| Keyword(5) | glass transition |
| 1st Author's Name | Akio Kitagawa |
| 1st Author's Affiliation | Department of Electrical & Computer Engineering,Faculty of Technology,Kanazawa University() |
| 2nd Author's Name | Masakuni Suzuki |
| 2nd Author's Affiliation | Department of Electrical & Computer Engineering,Faculty of Technology,Kanazawa University |
| 3rd Author's Name | Lin Huang |
| 3rd Author's Affiliation | Department of Electrical & Computer Engineering,Faculty of Technology,Kanazawa University |
| Date | 1993/12/9 |
| Paper # | SDM93-153 |
| Volume (vol) | vol.93 |
| Number (no) | 368 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |