| Presentation | 1993/4/22 Moditication of retractory metal oxides by SR irradiation Masao Nagase, Housei Akazawa, Yuichi Utsumi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | SR(synchrotron radiation)irradiation effects on refractory metal oxides were investigated.It was found that polycrystalline MoO3 film was changed to polycrystalline MoO2.In addition,native oxides on molybdenum and tungsten films were effectively removed.Mo-O bonds in MoO2 are more resistive to dissociation due to SR irradiation than those in MoO3.The native oxide reduction induced by SR irradiation involves two kinds of desorption processes.These results indicate that SR irradiation stimulated desorption of oxygen from the bulk of the oxide films depends strongly on the bonding state or the site of oxygen atoms.The molybdenum surface, from which the native oxide has been removed by SR irradiation,is highly silicidation-reactive with disilane gas. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | synchrotorn radiation / mattrial moditication / retractory metal oxide / Mo / W / disilane |
| Paper # | SDM93-10 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1993/4/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Moditication of retractory metal oxides by SR irradiation |
| Sub Title (in English) | |
| Keyword(1) | synchrotorn radiation |
| Keyword(2) | mattrial moditication |
| Keyword(3) | retractory metal oxide |
| Keyword(4) | Mo |
| Keyword(5) | W |
| Keyword(6) | disilane |
| 1st Author's Name | Masao Nagase |
| 1st Author's Affiliation | NTT LSI Laboratorys() |
| 2nd Author's Name | Housei Akazawa |
| 2nd Author's Affiliation | NTT LSI Laboratorys |
| 3rd Author's Name | Yuichi Utsumi |
| 3rd Author's Affiliation | NTT LSI Laboratorys |
| Date | 1993/4/22 |
| Paper # | SDM93-10 |
| Volume (vol) | vol.93 |
| Number (no) | 7 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |