| Presentation | 1993/4/22 Static charge removal with IPA solution : Static charge prevention in wet chemical process Seiji Sudoh, Hitoshi Morinaga, Tadahiro Ohmi, Hiroyuki Mishima, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Achieving a clean manufacturing environment,static charge is one of the most important factor.Electrostatic discharge causes device destruction and circuit disconnection,additionally the problem of floating particle adhesion.In order to eliminate static charge build up in wet chemical processes,the IPA vapor drying method is the most effective.Using quantitative method for the direct measurement of static charge,the mechanism of static charge removal by IPA solution was studied. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | static charge / IPA / IPA solution / wet chemical process / particle adhesion / IPA vaper dryer |
| Paper # | SDM93-3 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
|---|---|
| Conference Date | 1993/4/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Static charge removal with IPA solution : Static charge prevention in wet chemical process |
| Sub Title (in English) | |
| Keyword(1) | static charge |
| Keyword(2) | IPA |
| Keyword(3) | IPA solution |
| Keyword(4) | wet chemical process |
| Keyword(5) | particle adhesion |
| Keyword(6) | IPA vaper dryer |
| 1st Author's Name | Seiji Sudoh |
| 1st Author's Affiliation | Department of Electronics,Faculty of Engineering,Tohoku University() |
| 2nd Author's Name | Hitoshi Morinaga |
| 2nd Author's Affiliation | Department of Electronics,Faculty of Engineering,Tohoku University |
| 3rd Author's Name | Tadahiro Ohmi |
| 3rd Author's Affiliation | Department of Electronics,Faculty of Engineering,Tohoku University |
| 4th Author's Name | Hiroyuki Mishima |
| 4th Author's Affiliation | Tokuyama Soda |
| Date | 1993/4/22 |
| Paper # | SDM93-3 |
| Volume (vol) | vol.93 |
| Number (no) | 7 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |