| Presentation | 1993/10/29 Remote plasma SiC deposition from organosilicons Wickramanayaka Sunil, Alecksander Wrobel, Yoichiro Nakanishi, Takatou Nakamura, Yoshinori Hatanaka, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Amorphous SiC:H films have been prepared by decomposition of tetramethylsilane(TMS)and hexamethyldisilane(DS)gaseous monomers in a remote hydrogen plasma.Substrates were held at a temperature between 30℃ to 400℃,during deposition.The highest optical band ga p of 3.42 eV is obtained for the film deposited with TMS at room remperature.All the a-SiC:H prepared show photoluminescence when excited with 325nm He-Cd laser.The peak of PL shifts towards red with the increase of substrate temperature during deposition.The amount of hydrogenation of a-SiC films is considered as the reason for the variation of PL emission intensity. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | a-SiC:H / Tetramethylsilane / Hexamethyldisilane / Photoluminascence |
| Paper # | SDM93-119 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 1993/10/29(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Remote plasma SiC deposition from organosilicons |
| Sub Title (in English) | |
| Keyword(1) | a-SiC:H |
| Keyword(2) | Tetramethylsilane |
| Keyword(3) | Hexamethyldisilane |
| Keyword(4) | Photoluminascence |
| 1st Author's Name | Wickramanayaka Sunil |
| 1st Author's Affiliation | Research Institute Electronics,Shizuoka University() |
| 2nd Author's Name | Alecksander Wrobel |
| 2nd Author's Affiliation | Polish Academy of Sciences |
| 3rd Author's Name | Yoichiro Nakanishi |
| 3rd Author's Affiliation | Research Institute Electronics,Shizuoka University |
| 4th Author's Name | Takatou Nakamura |
| 4th Author's Affiliation | Faculty of Engineering,Shizuoka University |
| 5th Author's Name | Yoshinori Hatanaka |
| 5th Author's Affiliation | Research Institute Electronics,Shizuoka University |
| Date | 1993/10/29 |
| Paper # | SDM93-119 |
| Volume (vol) | vol.93 |
| Number (no) | 301 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |