| Presentation | 1993/7/26 The Effect of High Voltage Stress on Poly Si MOSTFT Alberto O. ADN, Motoharu Arimura, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Hot-carrier effects in PolySi PMOS Ms,for SRM application,have been investigated.Devices stressed in the OFF state at Vds>7v,show more than 1, 10 reduction of the leakage(IOFF)current,and suppression of the Gate Induced Drain Leakage(GIDL).kmealing at 400℃ recovers the device characteristics to the pre-stress values. Correlation of the hot-carrier effects,leakage current mechanism and gate current are demonstrated.The increase of the gate current follows the increase of drain OFF current with drain voltage, determined by band-to-band tunneling in the gate-drain overlap region.IOFF reduction and GIDL suppression are caused by hot- electron trapping in the gate oxide,am this phenomena is supported bv the correlation with the measured gate current. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | PolySi / TFT / SRAM / Hot-Carrier |
| Paper # | SDM93-62 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1993/7/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The Effect of High Voltage Stress on Poly Si MOSTFT |
| Sub Title (in English) | |
| Keyword(1) | PolySi |
| Keyword(2) | TFT |
| Keyword(3) | SRAM |
| Keyword(4) | Hot-Carrier |
| 1st Author's Name | Alberto O. ADN |
| 1st Author's Affiliation | IC Group VLSI Research lab.,SHARP() |
| 2nd Author's Name | Motoharu Arimura |
| 2nd Author's Affiliation | IC Group VLSI Research lab.,SHARP |
| Date | 1993/7/26 |
| Paper # | SDM93-62 |
| Volume (vol) | vol.93 |
| Number (no) | 172 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |