| Presentation | 1993/7/26 A superior method of eliminating B mode dielectric breakdown failure in gate oxides ulitizing a using charging phenomenon Yukihiro Tominaga, Akihiko Nara, Takatoshi Ushikoshi, Tsuneo Ajioka, Hironori Kitabayashi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed a new method to reduce B mode dielectric breakdown of gate oxide by means of charge up at near intrinsic dielectric breakdown voltage.The charge is generated by pouring deionized water on a wafer with gate oxide which is placed on a spinchuk in a brush scrubber.The charge up voltage increases with increasing the spin rate and saturates close to intrinsic dielectric breakdown.This charge up can reduce B mode dielectric breakdown,which may be attributed to self-healing of gate oxide. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | gate oxide / brsh-scrub / charge up / B mode dielectric breakdown |
| Paper # | SDM93-61 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1993/7/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A superior method of eliminating B mode dielectric breakdown failure in gate oxides ulitizing a using charging phenomenon |
| Sub Title (in English) | |
| Keyword(1) | gate oxide |
| Keyword(2) | brsh-scrub |
| Keyword(3) | charge up |
| Keyword(4) | B mode dielectric breakdown |
| 1st Author's Name | Yukihiro Tominaga |
| 1st Author's Affiliation | LSI Process Technology Department,OKI Electric() |
| 2nd Author's Name | Akihiko Nara |
| 2nd Author's Affiliation | Miyagi Oki Electric |
| 3rd Author's Name | Takatoshi Ushikoshi |
| 3rd Author's Affiliation | Miyagi Oki Electric |
| 4th Author's Name | Tsuneo Ajioka |
| 4th Author's Affiliation | LSI Process Technology Department,OKI Electric |
| 5th Author's Name | Hironori Kitabayashi |
| 5th Author's Affiliation | LSI Process Technology Department,OKI Electric |
| Date | 1993/7/26 |
| Paper # | SDM93-61 |
| Volume (vol) | vol.93 |
| Number (no) | 172 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |