| Presentation | 1995/10/20 Growth of ZnSe films on Silicon by H-radical assisted MOCVD M. Morita, T. Aoki, Y. Nakanishi, Y. Hatanaka, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | ZnSe films were grown on silicon substrates by H-radical assisted MOCVD technique. Though it is difficult in obtaining epitaxial ZnSe film on non-polar silicon substrates, when H-radicals are introduced into the reaction site, an epitaxial growth could be observed on Si(1OO) and Si(111)substrates. H-radicals facilitate an epitaxial growth by dissociating and removing weak bonds exist in the growing film. Further, H-radicals etch the film to some certain extent. This etching rate is found to be inversely propotional to the film growth rate. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ZnSe / MOCVD / remote Plasma CVD / radical etching / Epitaxial growth on Si |
| Paper # | SDM95-152 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 1995/10/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth of ZnSe films on Silicon by H-radical assisted MOCVD |
| Sub Title (in English) | |
| Keyword(1) | ZnSe |
| Keyword(2) | MOCVD |
| Keyword(3) | remote Plasma CVD |
| Keyword(4) | radical etching |
| Keyword(5) | Epitaxial growth on Si |
| 1st Author's Name | M. Morita |
| 1st Author's Affiliation | Research Institure of Electronics, Shizuoka University() |
| 2nd Author's Name | T. Aoki |
| 2nd Author's Affiliation | Research Institure of Electronics, Shizuoka University |
| 3rd Author's Name | Y. Nakanishi |
| 3rd Author's Affiliation | Research Institure of Electronics, Shizuoka University |
| 4th Author's Name | Y. Hatanaka |
| 4th Author's Affiliation | Research Institure of Electronics, Shizuoka University |
| Date | 1995/10/20 |
| Paper # | SDM95-152 |
| Volume (vol) | vol.95 |
| Number (no) | 317 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |