| Presentation | 1995/12/8 Evaluation of the recombination property at a metal/silicon interface by the laser/microwave method Takanori Makino, Masaya Ichimura, Akira Usami, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We investigate the recombination property at a metal/silicon interface using a noncontact laser/microwave method. The results show that the effective surface recombination velocity does not change in case of Schottky contacts, whereas it decreases for an n-type silicon which has ohmic contacts on the surface. This is because of the infinite surface recombination velocity at a metal/silicon interface and the insufficient minority carrier blocking by the band bending at the interface. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | band bending / surface recombination velocity / noncontact laser/microwave method / lifetime / Schottky contact / ohmic contact |
| Paper # | SDM95-192 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1995/12/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation of the recombination property at a metal/silicon interface by the laser/microwave method |
| Sub Title (in English) | |
| Keyword(1) | band bending |
| Keyword(2) | surface recombination velocity |
| Keyword(3) | noncontact laser/microwave method |
| Keyword(4) | lifetime |
| Keyword(5) | Schottky contact |
| Keyword(6) | ohmic contact |
| 1st Author's Name | Takanori Makino |
| 1st Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology() |
| 2nd Author's Name | Masaya Ichimura |
| 2nd Author's Affiliation | Center for Coperative Research, Nagoya Institute of Technology |
| 3rd Author's Name | Akira Usami |
| 3rd Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology |
| Date | 1995/12/8 |
| Paper # | SDM95-192 |
| Volume (vol) | vol.95 |
| Number (no) | 400 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |