Presentation | 1995/4/21 Conductance Oscillations in a Split-Gate MOSFET Fabricated on an SOI Substrate Hiroki Ishikuro, Toshiro Hiramoto, Hiroyuki Fujita, Toshiaki Ikoma, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | A very narrow, short channel n-MOSFET has been fabricated utilizing the electrostatic potential confinement by a split-gate on an SOI substrate and it's electrical transport properties have been investigated at very low temperatures (≤4.2 K). Conductance as a function of the split-gate voltage exhibits oscillations near the pinchoff voltage. The oscillations consist of a periodic component and aperiodic components. Current-voltage (I_ |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Coulomb blockade / single electron tunneling / hopping transport / split-gate / SOI / MOS |
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Committee | SDM |
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Conference Date | 1995/4/21(1days) |
Place (in Japanese) | (See Japanese page) |
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Registration To | Silicon Device and Materials (SDM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Conductance Oscillations in a Split-Gate MOSFET Fabricated on an SOI Substrate |
Sub Title (in English) | |
Keyword(1) | Coulomb blockade |
Keyword(2) | single electron tunneling |
Keyword(3) | hopping transport |
Keyword(4) | split-gate |
Keyword(5) | SOI |
Keyword(6) | MOS |
1st Author's Name | Hiroki Ishikuro |
1st Author's Affiliation | Institute of Industrial Science, University of Tokyo() |
2nd Author's Name | Toshiro Hiramoto |
2nd Author's Affiliation | Institute of Industrial Science, University of Tokyo |
3rd Author's Name | Hiroyuki Fujita |
3rd Author's Affiliation | Institute of Industrial Science, University of Tokyo |
4th Author's Name | Toshiaki Ikoma |
4th Author's Affiliation | T.I. Tsukuba R&D Center Ltd. |
Date | 1995/4/21 |
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Volume (vol) | vol.95 |
Number (no) | 10 |
Page | pp.pp.- |
#Pages | 5 |
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