Presentation | 1995/4/21 Investigation of Porous Silicon Electroluminescence during Anodic Oxidation and its micro-structure analysis Tadashi Sakai, Taketoshi Suzuki, Li Zhang, |
---|---|
PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Porous silicon (PS) electroluminescence (EL) and photoluminescence (PL) during anodic oxidation have been analyzed simultaneously at first time. As a result, PS made under illumination was found to have an isolated powder like nano-structure especially in the surface region. Therefore, the wavelength of PL did not agree with the EL which is generated from the inner like network structure. On the other hand, PS made in dark condition has good network like nano-structure through the substrate interface to the top surface, and the PL peak agreed with the EL. On the bases of this network structure, EL efficiency has been developed at a maximum of 0.35% by applying pre-anodic oxidation and HF etching technique. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | porous silicon / anodic oxidation / EL / PL / emission efficiency / silicon quantum wire |
Paper # | |
Date of Issue |
Conference Information | |
Committee | SDM |
---|---|
Conference Date | 1995/4/21(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
Secretary | |
Assistant |
Paper Information | |
Registration To | Silicon Device and Materials (SDM) |
---|---|
Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Investigation of Porous Silicon Electroluminescence during Anodic Oxidation and its micro-structure analysis |
Sub Title (in English) | |
Keyword(1) | porous silicon |
Keyword(2) | anodic oxidation |
Keyword(3) | EL |
Keyword(4) | PL |
Keyword(5) | emission efficiency |
Keyword(6) | silicon quantum wire |
1st Author's Name | Tadashi Sakai |
1st Author's Affiliation | Research and Development Center, Toshiba Corporation() |
2nd Author's Name | Taketoshi Suzuki |
2nd Author's Affiliation | Research and Development Center, Toshiba Corporation |
3rd Author's Name | Li Zhang |
3rd Author's Affiliation | Research and Development Center, Toshiba Corporation |
Date | 1995/4/21 |
Paper # | |
Volume (vol) | vol.95 |
Number (no) | 10 |
Page | pp.pp.- |
#Pages | 8 |
Date of Issue |