| Presentation | 1996/5/23 A 0.54μm^2 Self-Aligned, HSG Floating Gate Cell(SAHF Cell) for 256Mbit Flash Memories H. Shirai, T. Kubota, I. Honma, H. Watanabe, H. Ono, T. Okazawa, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A 0.54μm^2 Self-Aligned memory cell with Hemispherical-grained (HSG) poly-Si Floating gate (SAHF cell) has been developed for 256Mbit flash memories. Applying hemispherical-grained (HSG) poly-Si to floating gate extends the upper surface area double that of the floating gate in comparison with the conventional ones. A high capacitive-coupling ratio of 0.8 and buried n^+ diffusion layers which are self-aligned to the floating gate poly-Si are realized simultaneously with a simple cell structure and fewer process steps. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Flash memory / HSGI / ONO / Self-Align |
| Paper # | SDM96-25 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
|---|---|
| Conference Date | 1996/5/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A 0.54μm^2 Self-Aligned, HSG Floating Gate Cell(SAHF Cell) for 256Mbit Flash Memories |
| Sub Title (in English) | |
| Keyword(1) | Flash memory |
| Keyword(2) | HSGI |
| Keyword(3) | ONO |
| Keyword(4) | Self-Align |
| 1st Author's Name | H. Shirai |
| 1st Author's Affiliation | NEC Corporation() |
| 2nd Author's Name | T. Kubota |
| 2nd Author's Affiliation | NEC Corporation |
| 3rd Author's Name | I. Honma |
| 3rd Author's Affiliation | NEC Corporation |
| 4th Author's Name | H. Watanabe |
| 4th Author's Affiliation | NEC Corporation |
| 5th Author's Name | H. Ono |
| 5th Author's Affiliation | NEC Corporation |
| 6th Author's Name | T. Okazawa |
| 6th Author's Affiliation | NEC Corporation |
| Date | 1996/5/23 |
| Paper # | SDM96-25 |
| Volume (vol) | vol.96 |
| Number (no) | 63 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |