| Presentation | 1996/5/23 Evaluation of Lateral Distribution of Interface Traps by Capacitance and Charge Pumping Methods in MOSFETs Hidetsugu Uchida, Koichi Fukuda, Hiroyuki Tanaka, Norio Hirashita, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A new measurement method for lateral distribution of generated interface traps is proposed. This method consists of the gate-to-drain capacitance measurement and the charge pumping measurement. The purpose of the capacitance measurement is to determine the position of the edge of the effective charge pumping area. The position obtained by the capacitance measurement method agrees with that by device simulation, which indicates the validity of the capacitance measurement method. Experimental results using this method exhibit that the lateral distribution of generated interface traps extends slightly when the generation rate is enhanced due to water in interdielectric films of n-channel MOSFETs. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | interface trap / charge pumping measurement / capacitance measurement / hot carrier |
| Paper # | SDM96-19 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 1996/5/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation of Lateral Distribution of Interface Traps by Capacitance and Charge Pumping Methods in MOSFETs |
| Sub Title (in English) | |
| Keyword(1) | interface trap |
| Keyword(2) | charge pumping measurement |
| Keyword(3) | capacitance measurement |
| Keyword(4) | hot carrier |
| 1st Author's Name | Hidetsugu Uchida |
| 1st Author's Affiliation | ULSI Research and Development Center, Oki Electric Industry Co., Ltd.() |
| 2nd Author's Name | Koichi Fukuda |
| 2nd Author's Affiliation | ULSI Research and Development Center, Oki Electric Industry Co., Ltd. |
| 3rd Author's Name | Hiroyuki Tanaka |
| 3rd Author's Affiliation | ULSI Research and Development Center, Oki Electric Industry Co., Ltd. |
| 4th Author's Name | Norio Hirashita |
| 4th Author's Affiliation | ULSI Research and Development Center, Oki Electric Industry Co., Ltd. |
| Date | 1996/5/23 |
| Paper # | SDM96-19 |
| Volume (vol) | vol.96 |
| Number (no) | 63 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |