Presentation 1996/5/23
Simulation for Degradation of Flash Memory due to Charge Traps in the Tunnel Oxide
Ayumi Yokozawa, Hiroki Shirai, Takeshi Okazawa,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) The degradation of the endurance and retention Characteristics of flash memories is predicted to be induced by charge trapping in the tunnel oxides generated during FN programming and erasing operations. In this paper, the generation of the oxide charge traps are deduced from the results of electrical measurements of simple MOS devices, and the degradation of the endurance and retention characteristics due to the generated charge traps have been simulated. The simulation results indicate that the reduction of FN current due to electron traps in the tunnel oxides degrades the endurance characteristics. The tunnel leakage current through the electron traps degrades the retention characteristics, and hole traps near the oxides/substrate interface increase this tunnel leakage current.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Flash Memories / Computer Simulation / Tunnel Oxides / Charge Trapping States FN Programming/Erasing / Endurance Characteristics / Retention Characteristics
Paper # SDM96-18
Date of Issue

Conference Information
Committee SDM
Conference Date 1996/5/23(1days)
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Paper Information
Registration To Silicon Device and Materials (SDM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Simulation for Degradation of Flash Memory due to Charge Traps in the Tunnel Oxide
Sub Title (in English)
Keyword(1) Flash Memories
Keyword(2) Computer Simulation
Keyword(3) Tunnel Oxides
Keyword(4) Charge Trapping States FN Programming/Erasing
Keyword(5) Endurance Characteristics
Keyword(6) Retention Characteristics
1st Author's Name Ayumi Yokozawa
1st Author's Affiliation NEC ULSI Device Development Laboratories()
2nd Author's Name Hiroki Shirai
2nd Author's Affiliation NEC ULSI Device Development Laboratories
3rd Author's Name Takeshi Okazawa
3rd Author's Affiliation NEC Memory Division
Date 1996/5/23
Paper # SDM96-18
Volume (vol) vol.96
Number (no) 63
Page pp.pp.-
#Pages 8
Date of Issue