| Presentation | 1996/5/23 Trap Generation due to Local Distortion and Impurities in Amorphous Silicon Dioxide Film Chioko Kaneta, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The generation mechanism and the properties of charge traps due to local distortion and impurities in amorphous silicon dioxide (a-SiO_2) film are investigated employing the abinitio molecular orbital method applied to a cluster model. It is shown that a hole injected into a-SiO_2 with a stretched Si-O-Si unit is trapped at the central oxygen in the unit. The bending of the Si-O-Si unit, OH, and F impurities have no significant effects on the hole trapping. It is also shown that a hole injected into a-SiO_2 containing Cl impurity is trapped at the Cl site, causing a large displacement of the Cl atom. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Silicon / Silicon Dioxide / Trap Center / Hole / Local Distortion / Impurity |
| Paper # | SDM96-17 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
|---|---|
| Conference Date | 1996/5/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Trap Generation due to Local Distortion and Impurities in Amorphous Silicon Dioxide Film |
| Sub Title (in English) | |
| Keyword(1) | Silicon |
| Keyword(2) | Silicon Dioxide |
| Keyword(3) | Trap Center |
| Keyword(4) | Hole |
| Keyword(5) | Local Distortion |
| Keyword(6) | Impurity |
| 1st Author's Name | Chioko Kaneta |
| 1st Author's Affiliation | Fujitsu Laboratories Ltd.() |
| Date | 1996/5/23 |
| Paper # | SDM96-17 |
| Volume (vol) | vol.96 |
| Number (no) | 63 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |