| Presentation | 1996/12/6 Evaluation of silicon surface etched with CLF_3 gas Tadashi Momma, Yoshinori Ishizaki, Yoji Saito, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Surface texturing process has been used to obtain a high efficiency of energy conversion in semiconductor solar cells. In this study, silicon surfaces were isotropically etched by CLF3 gas, and the morphology and the optical reflectance of the etched surfaces were investigated. It is found that the reflectance remarkably decreases by the multi-reflection phenomena in the textured surface. The reflectance of the surface could be reduced in the best condition to less then 1O%. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | solar cell / single crystal silicon / CLF3 gas / plasmaless etching / texture / reflectance |
| Paper # | SDM96-159 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1996/12/6(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation of silicon surface etched with CLF_3 gas |
| Sub Title (in English) | |
| Keyword(1) | solar cell |
| Keyword(2) | single crystal silicon |
| Keyword(3) | CLF3 gas |
| Keyword(4) | plasmaless etching |
| Keyword(5) | texture |
| Keyword(6) | reflectance |
| 1st Author's Name | Tadashi Momma |
| 1st Author's Affiliation | Department of Electric Engineering and Electronics, Faculty of Engineering, Seikei University() |
| 2nd Author's Name | Yoshinori Ishizaki |
| 2nd Author's Affiliation | Department of Electric Engineering and Electronics, Faculty of Engineering, Seikei University |
| 3rd Author's Name | Yoji Saito |
| 3rd Author's Affiliation | Department of Electric Engineering and Electronics, Faculty of Engineering, Seikei University |
| Date | 1996/12/6 |
| Paper # | SDM96-159 |
| Volume (vol) | vol.96 |
| Number (no) | 396 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |