Presentation 1996/12/5
Photoluminescence of Er doped Si-rich SiO2 films
M. Yoshida, Y. Kanzawa, M. Fuji, S. Hayashi, K. Yamamoto,
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Abstract(in English) We have prepared SiO_2 films containing Si nanocrystals and h by cosputtering Si,SiO_2 and Er_2O_3. These samples showed photo luminescence (PL) peaks at 1.54eV and 0.81eV which can be attributed to electron-hole recombination in Si nanocrystals and intra-4f transition in Er^<3+>, respectively. As the concentration of Er atoms in the films increased, the PL intensity of Si nanocrystals decreased and that of Er increased. This suggests that the PL of Er is mediated by energy transfer from Si nanocrystals to Er^<3+>
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Er / Si nanocrystal / photoluminescence / energy transfer / cosputtering
Paper # SDM96-146
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Committee SDM
Conference Date 1996/12/5(1days)
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Registration To Silicon Device and Materials (SDM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Photoluminescence of Er doped Si-rich SiO2 films
Sub Title (in English)
Keyword(1) Er
Keyword(2) Si nanocrystal
Keyword(3) photoluminescence
Keyword(4) energy transfer
Keyword(5) cosputtering
1st Author's Name M. Yoshida
1st Author's Affiliation The Graduate School of Science and Technology, Kobe University()
2nd Author's Name Y. Kanzawa
2nd Author's Affiliation The Graduate School of Science and Technology, Kobe University
3rd Author's Name M. Fuji
3rd Author's Affiliation The Graduate School of Science and Technology, Kobe University
4th Author's Name S. Hayashi
4th Author's Affiliation The Graduate School of Science and Technology, Kobe University:Department of Electrical and Electronics Engineering, Faculty of Engineering, Kobe Universities
5th Author's Name K. Yamamoto
5th Author's Affiliation The Graduate School of Science and Technology, Kobe University:Department of Electrical and Electronics Engineering, Faculty of Engineering, Kobe Universities
Date 1996/12/5
Paper # SDM96-146
Volume (vol) vol.96
Number (no) 395
Page pp.pp.-
#Pages 5
Date of Issue