Presentation 1996/11/14
Data Optimization in Semiconductor Manufacturing
David A. Acree, Kenji Matsubara,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) In today's fast paced world of automation and computers, collection of data is easier than ever. Unfortunately, data collection ease can frequently produce more data than is actually needed for good decisionmaking. This proliferation of data collection can actually impede manufacturing efficiency. Data can be optimized in the sense that less data can be collected while actually getting better information. This paper gives an approach that was applied in reducing data collection in a modern semiconductor fab operation that was still ramping production. While data was reduced, information for decisionmaking was improved. The approach is detailed step by step. Examples of actual optimization activities are described. Benefits from the optimization are included along with lessons learned.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Data / Optimization / SPC
Paper # SDM96-120
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Conference Information
Committee SDM
Conference Date 1996/11/14(1days)
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Paper Information
Registration To Silicon Device and Materials (SDM)
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Data Optimization in Semiconductor Manufacturing
Sub Title (in English)
Keyword(1) Data
Keyword(2) Optimization
Keyword(3) SPC
1st Author's Name David A. Acree
1st Author's Affiliation Fujitsu AMD Semiconductor Limited()
2nd Author's Name Kenji Matsubara
2nd Author's Affiliation Fujitsu AMD Semiconductor Limited
Date 1996/11/14
Paper # SDM96-120
Volume (vol) vol.96
Number (no) 359
Page pp.pp.-
#Pages 10
Date of Issue