Presentation | 1996/11/14 Data Optimization in Semiconductor Manufacturing David A. Acree, Kenji Matsubara, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | In today's fast paced world of automation and computers, collection of data is easier than ever. Unfortunately, data collection ease can frequently produce more data than is actually needed for good decisionmaking. This proliferation of data collection can actually impede manufacturing efficiency. Data can be optimized in the sense that less data can be collected while actually getting better information. This paper gives an approach that was applied in reducing data collection in a modern semiconductor fab operation that was still ramping production. While data was reduced, information for decisionmaking was improved. The approach is detailed step by step. Examples of actual optimization activities are described. Benefits from the optimization are included along with lessons learned. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Data / Optimization / SPC |
Paper # | SDM96-120 |
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Conference Information | |
Committee | SDM |
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Conference Date | 1996/11/14(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Silicon Device and Materials (SDM) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Data Optimization in Semiconductor Manufacturing |
Sub Title (in English) | |
Keyword(1) | Data |
Keyword(2) | Optimization |
Keyword(3) | SPC |
1st Author's Name | David A. Acree |
1st Author's Affiliation | Fujitsu AMD Semiconductor Limited() |
2nd Author's Name | Kenji Matsubara |
2nd Author's Affiliation | Fujitsu AMD Semiconductor Limited |
Date | 1996/11/14 |
Paper # | SDM96-120 |
Volume (vol) | vol.96 |
Number (no) | 359 |
Page | pp.pp.- |
#Pages | 10 |
Date of Issue |