| Presentation | 1997/8/26 A study of memory cell for high density DRAM Yoshitaka Tadaki, Toshihiro Sekiguchi, Jun Murata, Masaya Muranaka, Masashi Miura, Kazuya Makabe, Toshiyuki Kaeriyama, Songsu Cho, Katsuo Yuhara, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Achieved high density DRAM adopting Gull-wing shape memory cell layout for active layer. Evaluation of isolation characteristics at electrically severe condition shows COPs cause isolation failures. Failure model is COP cause thinning of the oxide thickness of LOCOS. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | DRAM / COP / LOCOS / Isolation |
| Paper # | SDM97-98 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 1997/8/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A study of memory cell for high density DRAM |
| Sub Title (in English) | |
| Keyword(1) | DRAM |
| Keyword(2) | COP |
| Keyword(3) | LOCOS |
| Keyword(4) | Isolation |
| 1st Author's Name | Yoshitaka Tadaki |
| 1st Author's Affiliation | Hitachi, Devive development center() |
| 2nd Author's Name | Toshihiro Sekiguchi |
| 2nd Author's Affiliation | Hitachi, Devive development center |
| 3rd Author's Name | Jun Murata |
| 3rd Author's Affiliation | Hitachi, Devive development center |
| 4th Author's Name | Masaya Muranaka |
| 4th Author's Affiliation | Hitachi VLSI engineering |
| 5th Author's Name | Masashi Miura |
| 5th Author's Affiliation | Hitachi VLSI engineering |
| 6th Author's Name | Kazuya Makabe |
| 6th Author's Affiliation | Hitachi VLSI engineering |
| 7th Author's Name | Toshiyuki Kaeriyama |
| 7th Author's Affiliation | Texas Instruments Japan |
| 8th Author's Name | Songsu Cho |
| 8th Author's Affiliation | Texas Instruments Japan |
| 9th Author's Name | Katsuo Yuhara |
| 9th Author's Affiliation | Texas Instruments Japan |
| Date | 1997/8/26 |
| Paper # | SDM97-98 |
| Volume (vol) | vol.97 |
| Number (no) | 240 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |