| Presentation | 1997/8/25 Chemistry of Si surface in water : Oxidaion and hydrogen exchange Michio Niwano, Shin-ich Tadokoro, Nobuo Miyamoto, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The chemical state of a hydrogen-terminated Si(100) surface during storage in water (H_2O) and heavy water (D_2O), has been investigated "in-situ" using infrared spectroscopy in the multiple internal reflection geometry. We have examined how infrared absorption spectra in the Si-H stretch vibration region change while the Si surface is immersed into H_2O and D_2O. We demonstrate that hydrogen exchange reaction takes place on the H-terminated Si surface during storage in water. It is also shown that for a long-term storage in water the hydrogen-terminated surface is oxidized to form intermediate oxidation states. Chemical processes involved in oxidation and etching are discussed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Si / Surface in water / Oxidation / Hydrogen exchange / IR spectroscopy / In-situ monitoring |
| Paper # | SDM97-86 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1997/8/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Chemistry of Si surface in water : Oxidaion and hydrogen exchange |
| Sub Title (in English) | |
| Keyword(1) | Si |
| Keyword(2) | Surface in water |
| Keyword(3) | Oxidation |
| Keyword(4) | Hydrogen exchange |
| Keyword(5) | IR spectroscopy |
| Keyword(6) | In-situ monitoring |
| 1st Author's Name | Michio Niwano |
| 1st Author's Affiliation | Research Institute of Electrical Communication, Tohoku University() |
| 2nd Author's Name | Shin-ich Tadokoro |
| 2nd Author's Affiliation | Faculty of Engineering, Tohoku-Gakuin University |
| 3rd Author's Name | Nobuo Miyamoto |
| 3rd Author's Affiliation | Faculty of Engineering, Tohoku-Gakuin University |
| Date | 1997/8/25 |
| Paper # | SDM97-86 |
| Volume (vol) | vol.97 |
| Number (no) | 239 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |