| Presentation | 1997/7/24 Simulated Performance of ArF Excimer Laser Lithography Optics Hai Biri Chung, Kag Hyeon Lee, Doh Hoon Kim, Sang-Soo Choi, Jong Soo Kim, Hyung Joun Yoo, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In ArF excimer laser lithography, catadioptric systems are widely used as projection optics. We have designed and analyzed two systems consisting of a mirror, a polarizing beam splitter, quarter wave plates and corrector lenses. Combination of a polarizing beam splitter and a quarter wave plate is used to separate the forward and backward beam and to remove the central obscuration. The life time of optical systems are analyzed by using the energy density conversion factor. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ArF excimer laser lithography / catadioptric system / life time / optical system. |
| Paper # | SDM97-46 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 1997/7/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Simulated Performance of ArF Excimer Laser Lithography Optics |
| Sub Title (in English) | |
| Keyword(1) | ArF excimer laser lithography |
| Keyword(2) | catadioptric system |
| Keyword(3) | life time |
| Keyword(4) | optical system. |
| 1st Author's Name | Hai Biri Chung |
| 1st Author's Affiliation | Semiconductor Tehnology Division, Electronics and Telecommunications Research Institute() |
| 2nd Author's Name | Kag Hyeon Lee |
| 2nd Author's Affiliation | Semiconductor Tehnology Division, Electronics and Telecommunications Research Institute |
| 3rd Author's Name | Doh Hoon Kim |
| 3rd Author's Affiliation | Semiconductor Tehnology Division, Electronics and Telecommunications Research Institute |
| 4th Author's Name | Sang-Soo Choi |
| 4th Author's Affiliation | Semiconductor Tehnology Division, Electronics and Telecommunications Research Institute |
| 5th Author's Name | Jong Soo Kim |
| 5th Author's Affiliation | Semiconductor Tehnology Division, Electronics and Telecommunications Research Institute |
| 6th Author's Name | Hyung Joun Yoo |
| 6th Author's Affiliation | Semiconductor Tehnology Division, Electronics and Telecommunications Research Institute |
| Date | 1997/7/24 |
| Paper # | SDM97-46 |
| Volume (vol) | vol.97 |
| Number (no) | 195 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |