| Presentation | 1997/5/23 Remote-plasma-excited nitridation process of surface and interface in silicon-oxide system Yoji Saito, Manabu Kodera, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | First, silicon substrates were directly oxynitrided by remote-plasma-excited nitrogen and oxygen. Second, we tried the oxynitridation of silicon dioxide films by the excited nitrogen and oxygen. Nitrogen is incorporated near the SiO_2-Si interface only if the substrate temperature is higher than 750℃. Moreover, nitrogen hardly remains near the surface of the dioxide films by the above procedures. We propose a novel technique, in which the dioxide films are fluorinated and subsequently nitrided by the excited nitrogen. The only surfaces of the dioxide films are nitrided and the nitrogen concentration of 2-3% is obtained by this process. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | silicon oxynitride / remote plasma / Auger electron spectroscopy / surface nitridation |
| Paper # | SDM97-18 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1997/5/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Remote-plasma-excited nitridation process of surface and interface in silicon-oxide system |
| Sub Title (in English) | |
| Keyword(1) | silicon oxynitride |
| Keyword(2) | remote plasma |
| Keyword(3) | Auger electron spectroscopy |
| Keyword(4) | surface nitridation |
| 1st Author's Name | Yoji Saito |
| 1st Author's Affiliation | Seikei University() |
| 2nd Author's Name | Manabu Kodera |
| 2nd Author's Affiliation | Seikei University |
| Date | 1997/5/23 |
| Paper # | SDM97-18 |
| Volume (vol) | vol.97 |
| Number (no) | 68 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |