| Presentation | 2001/6/13 Evaluation of proton-exchanged and annealed layers in LiTaO_3 optoelectronic devices by line-focus-beam ultrasonic material characterization system Masahito Miyashita, Jun-ichi Kushibiki, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this paper, an application of the line-focus-beam ultrasonic material characterization system is demonstrated to evaluate fabrication process conditions of annealing for proton-exchanged Z-cut LiTaO_3 substrates. Twelve Z-cut LiTaO_3 specimens were proton-exchanged at 260℃ for 14 min and annealed at 420℃ for various times of 10 sec to 24 h. Leaky surface acoustic wave (LSAW) velocity at an ultrasonic frequency of 225 MHz decreases by 78 m/s due to proton exchange and increases due to annealing. Changes in LSAW velocity by anncaling increase from 11 m/s to 73 m/s as anncaling times increase. LSAW velocity decreases with the increasing the product fH of frequency f and depth H of proton-diffused layer. The gradients of fH dependences of LSAW velocity become gentler with an increase of annealing time, depending upon the concentrations of hydrogen and lithium in the layers. The relationships among LSAW velocities, annealing times, depths of proton-diffused layers, hydrogen concentrations at the surfaces, and gradients of fH dependences of LSAW velocity are experimentally obtained. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | line-focus-beam ultrasonic material characterization system / leaky surface acoustic wave / evaluation of process condition / proton exchange / annealing / optical waveguide |
| Paper # | US2001-20 |
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| Committee | US |
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| Conference Date | 2001/6/13(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation of proton-exchanged and annealed layers in LiTaO_3 optoelectronic devices by line-focus-beam ultrasonic material characterization system |
| Sub Title (in English) | |
| Keyword(1) | line-focus-beam ultrasonic material characterization system |
| Keyword(2) | leaky surface acoustic wave |
| Keyword(3) | evaluation of process condition |
| Keyword(4) | proton exchange |
| Keyword(5) | annealing |
| Keyword(6) | optical waveguide |
| 1st Author's Name | Masahito Miyashita |
| 1st Author's Affiliation | Graduate School of Engineering, Tohoku University() |
| 2nd Author's Name | Jun-ichi Kushibiki |
| 2nd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| Date | 2001/6/13 |
| Paper # | US2001-20 |
| Volume (vol) | vol.101 |
| Number (no) | 116 |
| Page | pp.pp.- |
| #Pages | 8 |
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