Presentation	2001/6/13 High Temperature Stable Surface Acoustic Wave Substrate of SiO_2/LiNbO_3 Structure with Super High Coupling Kazuhiko Yamanouchi,
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Abstract(in English)	In this paper, in order to improve the TCF the propagation characteristics of SiO_2/Rotated Y-cut, X-propagating LiNbO_3 leaky SAW substrates with a large k^2 (Electromechanical coupling) and zero TCF (Temperature coefficient of frequency) are theretically investigated. The results showed a large k^2 of leaky SAW over 0.2 (zero k^2 of Rayleigh mode), zero TCF and zero propagation attenuation in the case of metallized surface at thin film thickness of H/λ≒0.15～0.25 (H: SiO_2 film thickness, λ:SAW wavelength) were obtained. The theoretical SAW resonator filter will be also described.
Keyword(in Japanese)	(See Japanese page)
Keyword(in English)	Surface Acoustic Wave / SiO_2/LiNbO_3 Substrate / High Coupling / zero TCF
Paper #	US2001-15
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Committee	US
Conference Date	2001/6/13(1days)
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Paper Information
Registration To	Ultrasonics (US)
Language	JPN
Title (in Japanese)	(See Japanese page)
Sub Title (in Japanese)	(See Japanese page)
Title (in English)	High Temperature Stable Surface Acoustic Wave Substrate of SiO_2/LiNbO_3 Structure with Super High Coupling
Sub Title (in English)
Keyword(1)	Surface Acoustic Wave
Keyword(2)	SiO_2/LiNbO_3 Substrate
Keyword(3)	High Coupling
Keyword(4)	zero TCF
1st Author's Name	Kazuhiko Yamanouchi
1st Author's Affiliation	Tohoku Institute of Technology()
Date	2001/6/13
Paper #	US2001-15
Volume (vol)	vol.101
Number (no)	116
Page	pp.pp.-
#Pages	10
Date of Issue