| Presentation | 2000/9/12 Rotational feedthrough using ultrasonic transducer for ultra-high vacuum condition Takeshi MORITA, Toshiki NIINO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Vacuum environment is indispensable for various measurement devices. To improve these devices, the mechatronics systems for vacuum conditions should be investigated. Ultrasonic motor has many advantages, and is suitable for vacuum conditions. Although, a piezo material may be a source of out gas and may hinder the baking treatment. So we arranged the piezoelectric part at outside of a vacuum chamber. The principle is a mode rotation type motor whose stator transducer was a bolted Langevin vibrator. This motor was successfully operated in the vacuum conditions that level was 2x10^<-6>Pa. An endurance of motor and the change of vacuum level were measured and discussed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Ultra-high vacuum condition / ultrasonic transducer / friction material |
| Paper # | US2000-57 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 2000/9/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Rotational feedthrough using ultrasonic transducer for ultra-high vacuum condition |
| Sub Title (in English) | |
| Keyword(1) | Ultra-high vacuum condition |
| Keyword(2) | ultrasonic transducer |
| Keyword(3) | friction material |
| 1st Author's Name | Takeshi MORITA |
| 1st Author's Affiliation | Advanced Engineering Center, RIKEN(The Institute of Physical and Chemical Research)() |
| 2nd Author's Name | Toshiki NIINO |
| 2nd Author's Affiliation | Institute of Industrial Science, University of Tokyo |
| Date | 2000/9/12 |
| Paper # | US2000-57 |
| Volume (vol) | vol.100 |
| Number (no) | 291 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |