| Presentation | 1999/2/12 Monolithic Integration of AT-Cut Resonators Using Laser Beam Scanning Satoru NOGE, Takehiko UNO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Monolithic integration of AT-cut quartz resonators was investigated. To reduce the mechanical coupling between resonators formed on an AT-cut quartz plate, an x-axis inversion area was formed between the resonators. We have developed a new twinning technique and applied it to fabricate resonator array on an AT-cut plate. A lattice composed of many x-axis inversion lines is formed on an AT-cut plate by the laser beam scanning and a resonator is formed on each area enclosed by the x-axis inversion lines. For example, a resonator array composed of 6 (2×3) resonators was fabricated on an artificial twin AT-cut quartz plate (plate size : 16×15mm). The width of the is isolation line (twinning area) was several times of plate thickness (i.e. about 1mm at 10MHz plate). It was confirmed that the resonators were almost completely isolated by the twinning area. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | quartz / x-axis inversion / laser beam scanning / resonator array / monolithic integration |
| Paper # | US98-108 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 1999/2/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Monolithic Integration of AT-Cut Resonators Using Laser Beam Scanning |
| Sub Title (in English) | |
| Keyword(1) | quartz |
| Keyword(2) | x-axis inversion |
| Keyword(3) | laser beam scanning |
| Keyword(4) | resonator array |
| Keyword(5) | monolithic integration |
| 1st Author's Name | Satoru NOGE |
| 1st Author's Affiliation | Dept. Electric and Electrical Eng. Kanagawa Institute of Technology() |
| 2nd Author's Name | Takehiko UNO |
| 2nd Author's Affiliation | Dept. Electric and Electrical Eng. Kanagawa Institute of Technology |
| Date | 1999/2/12 |
| Paper # | US98-108 |
| Volume (vol) | vol.98 |
| Number (no) | 587 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |