| Presentation | 1999/2/12 Measurement of the thermal conductivity of CVD-diamond film by photoacoustic method Nobuya TAKABATAKE, Takeshi KOBAYASHI, Kohji HOHKAWA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In the recent advanced technologies, thermophysical properties of thin films are needed for several research fields. In general, the thermal conductivity of CVD-diamond film has been measured using thermocouples. Photoacoustic technique, however, is one of a useful technique to determine the thermal conductivity of the thin film deposited on the substrate, because it can be measured without touching the sample. We applied it for measured the thermal conductivity on the vertical-depth direction to the diamond film deposited on the silicon wafer. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Diamond film / Thermal conductivity / Thin film / Photoacoustic technique / PAS |
| Paper # | US98-107 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 1999/2/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Measurement of the thermal conductivity of CVD-diamond film by photoacoustic method |
| Sub Title (in English) | |
| Keyword(1) | Diamond film |
| Keyword(2) | Thermal conductivity |
| Keyword(3) | Thin film |
| Keyword(4) | Photoacoustic technique |
| Keyword(5) | PAS |
| 1st Author's Name | Nobuya TAKABATAKE |
| 1st Author's Affiliation | Dept. Electrical and Electronic Eng., KANAGAWA Institute of Technology() |
| 2nd Author's Name | Takeshi KOBAYASHI |
| 2nd Author's Affiliation | Dept. Electrical and Electronic Eng., KANAGAWA Institute of Technology |
| 3rd Author's Name | Kohji HOHKAWA |
| 3rd Author's Affiliation | Dept. Electrical and Electronic Eng., KANAGAWA Institute of Technology |
| Date | 1999/2/12 |
| Paper # | US98-107 |
| Volume (vol) | vol.98 |
| Number (no) | 587 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |