| Presentation | 1998/9/17 Simulation experiments for evaluation of fabrication systems for proton-exchanged layers employed in LiTaO_3 optoelectronic devices by line-focus-beam acoustic microscopy Masahito Miyashita, Jun-ichi Kushibiki, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this paper, simulation experiments for demonstrating a usefulness of evaluation of fabrication systems for proton-exchanged layers employed in optoelectronic divices by line-focus-beam(LTB) acoustic microscopy are conducted. Taking beaker size as one of the system parameters, three specimens of 2-inch Z-cut LiTaO_3 wafers were proton-exchanged in three beakers of different size, viz., 200 cc, 300 cc, and 500 cc, at 260℃ for 14 min, in order to measure leaky surface acoustic wave(LSAW) velocity by the LFB system. It is observed that profiles of LSAW velocity measured for the three specimens at 225 MHz are quite different from each other. It is shown that the profiles of LSAW velocity mainly reflet the distributions of the acid temperature during proton exchange and that the differences in the profiles of LSAW velocity reflect the differences in the distributions of process conditions characteristic of the fabrication systems. Also, surface damages, micro holes formed during the processes, are detected by this ultrasonic method. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | line-focus-beam acoustic microscopy / leaky surface acoustic wave velocity / waveguide-type optoelectronic devices / characterization of fabrication systems / proton-exchanged LiTaO_3 / distribution of process conditions |
| Paper # | US98-47 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 1998/9/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Simulation experiments for evaluation of fabrication systems for proton-exchanged layers employed in LiTaO_3 optoelectronic devices by line-focus-beam acoustic microscopy |
| Sub Title (in English) | |
| Keyword(1) | line-focus-beam acoustic microscopy |
| Keyword(2) | leaky surface acoustic wave velocity |
| Keyword(3) | waveguide-type optoelectronic devices |
| Keyword(4) | characterization of fabrication systems |
| Keyword(5) | proton-exchanged LiTaO_3 |
| Keyword(6) | distribution of process conditions |
| 1st Author's Name | Masahito Miyashita |
| 1st Author's Affiliation | Department of Electrical Engineering, Faculty of Engineering, Tohoku University() |
| 2nd Author's Name | Jun-ichi Kushibiki |
| 2nd Author's Affiliation | Department of Electrical Engineering, Faculty of Engineering, Tohoku University |
| Date | 1998/9/17 |
| Paper # | US98-47 |
| Volume (vol) | vol.98 |
| Number (no) | 270 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |