| Presentation | 1998/9/17 THEORETICAL ANALYSIS OF A PIEZOELECTRIC THIN FILM RESONATOR WITH ACOUSTIC QUARTER-WAVE MULTILAYERS Hirofumi KANBARA, Kiyoshi NAKAMURA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The resonator consisting of a piezoelectric film on alternately laminated low and high acoustic impedance layers seems to be useful as a piezoelectric resonator for use in a very high frequency range from 500MHz to over ten GHz. This resonator is theoretically analysed using an equivalent circuit model taking account of acoustic loss and electrode thickness. It is shown that the Q approaches to that of the piezoelectric film with increasing layer number of multilayers. Even if the layer number is large enough, the admittance response disagrees with that of the piezoelectric film with traction-free surfaces and K_ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Piezoelectric resonator / Multilayers / Electromechanical coupling factor / ZnO |
| Paper # | US98-43 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 1998/9/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | THEORETICAL ANALYSIS OF A PIEZOELECTRIC THIN FILM RESONATOR WITH ACOUSTIC QUARTER-WAVE MULTILAYERS |
| Sub Title (in English) | |
| Keyword(1) | Piezoelectric resonator |
| Keyword(2) | Multilayers |
| Keyword(3) | Electromechanical coupling factor |
| Keyword(4) | ZnO |
| 1st Author's Name | Hirofumi KANBARA |
| 1st Author's Affiliation | Department of Electrical Communication Engineering Graduate School of Engineering, Tohoku University() |
| 2nd Author's Name | Kiyoshi NAKAMURA |
| 2nd Author's Affiliation | Department of Electrical Communication Engineering Graduate School of Engineering, Tohoku University |
| Date | 1998/9/17 |
| Paper # | US98-43 |
| Volume (vol) | vol.98 |
| Number (no) | 270 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |