Presentation 1993/7/22
A measurments and its applications of longitudinal wave velocities of piezoelectric ceramic substrates by acoustic microscope.
Takeshi Kitamura, Michio Kadota, Tooru Kasanami,
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Abstract(in English) A longitudinal wave velocity on piezoelectric ceramic substrate for ceramic filters and resonators is obtained from an electrical characteristics of filters and resonators after many manufacturing processes such as poling,electroding and so on.But this method has some problems that are long period for various processing and a serious processing dispersion.In order to dissolve the above- mentioned problems,we examined a measurement method for longitudinal wave velocity by pulse interference method using acoustic microscope.From the result of this experiment,we were able to obtain a fine correlation between the measurement value by acoustic microscope on piezoelectric ceramic substrate before process of poling and electroding,and the frequency characteristics of the filters or the resonatorsafter processing.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) piezoelectric ceramic / longitudinal wave velocity / acoustic microscope / pulse interference method
Paper # US93-19
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Committee US
Conference Date 1993/7/22(1days)
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Registration To Ultrasonics (US)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) A measurments and its applications of longitudinal wave velocities of piezoelectric ceramic substrates by acoustic microscope.
Sub Title (in English)
Keyword(1) piezoelectric ceramic
Keyword(2) longitudinal wave velocity
Keyword(3) acoustic microscope
Keyword(4) pulse interference method
1st Author's Name Takeshi Kitamura
1st Author's Affiliation Murata Mfg,Co.,Ltd.()
2nd Author's Name Michio Kadota
2nd Author's Affiliation Murata Mfg,Co.,Ltd.
3rd Author's Name Tooru Kasanami
3rd Author's Affiliation Murata Mfg,Co.,Ltd.
Date 1993/7/22
Paper # US93-19
Volume (vol) vol.93
Number (no) 157
Page pp.pp.-
#Pages 6
Date of Issue