| Presentation | 1993/6/18 Control of temperature coefficients of delay time for SAW propagating in thin film layers. Yasuhiko Nakagawa, Tadahiro Omata, Keiko Hosaka, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This study proposes the control method of the 1 st- and 2nd- order temperature coefficients of two-layer substrate composed of ZnO and Ta_2O_5 thin films which have the 2nd-order temperature coefficients of delay time with the signs opposite to each other. There is a point where the 2nd-order temperature coefficient turns from plus to minus on the curve of film thicckness giving zero of the 1st-order temperature coefficient. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | surface acostic wave / piezoelectric thin film / temperature coefficient |
| Paper # | US93-15,CPM93-29 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 1993/6/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Control of temperature coefficients of delay time for SAW propagating in thin film layers. |
| Sub Title (in English) | |
| Keyword(1) | surface acostic wave |
| Keyword(2) | piezoelectric thin film |
| Keyword(3) | temperature coefficient |
| 1st Author's Name | Yasuhiko Nakagawa |
| 1st Author's Affiliation | Department of Electeronic and information,Faculty of Engineering, Yamanashi University() |
| 2nd Author's Name | Tadahiro Omata |
| 2nd Author's Affiliation | Department of Electeronic and information,Faculty of Engineering, Yamanashi University |
| 3rd Author's Name | Keiko Hosaka |
| 3rd Author's Affiliation | Department of Electeronic and information,Faculty of Engineering, Yamanashi University |
| Date | 1993/6/18 |
| Paper # | US93-15,CPM93-29 |
| Volume (vol) | vol.93 |
| Number (no) | 95 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |