| Presentation | 1993/9/21 A measurement method of movement characteristics of precision mechanical-translation stages using ultrasonic plane waves. Yuu Ono, Jun-ichi Kushibiki, Noriyoshi Chubachi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A method of measuring the movement characteristics of precision mechanical-translation stages using ultrasonic plane waves is presented.The movement characteristics is obtained by analyzing the phase variation of ultrasonic waves reflected from a reflector set on the translation stage.The method is demonstrated for a z- stage of the line-focus-beam acoustic microscope.The phase velocity measurement error for leaky surface acoustic waves caused by the positioning error of the z-stage is investigated theoretically and experimentally.The linear positioning error and straightness are estimated at 225 MHz.The positioning error can be corrected using the measured movement characteristics. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | mechanical-translation stage / movement characteristic / ultrasonic plane wave / phase measurement / line-focus-beam acoustic microscope / leaky surface acoustic wave |
| Paper # | US93-44 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 1993/9/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A measurement method of movement characteristics of precision mechanical-translation stages using ultrasonic plane waves. |
| Sub Title (in English) | |
| Keyword(1) | mechanical-translation stage |
| Keyword(2) | movement characteristic |
| Keyword(3) | ultrasonic plane wave |
| Keyword(4) | phase measurement |
| Keyword(5) | line-focus-beam acoustic microscope |
| Keyword(6) | leaky surface acoustic wave |
| 1st Author's Name | Yuu Ono |
| 1st Author's Affiliation | Department of Electrical Engineering,Faculty of Engineering,Tohoku University() |
| 2nd Author's Name | Jun-ichi Kushibiki |
| 2nd Author's Affiliation | Department of Electrical Engineering,Faculty of Engineering,Tohoku University |
| 3rd Author's Name | Noriyoshi Chubachi |
| 3rd Author's Affiliation | Department of Electrical Engineering,Faculty of Engineering,Tohoku University |
| Date | 1993/9/21 |
| Paper # | US93-44 |
| Volume (vol) | vol.93 |
| Number (no) | 245 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |