Presentation 1995/9/22
Analysis of SAWs obliquely propagating on metallic gratings with finite thickness
Ken-ya Hashimoto, Gou Endoh, Makoto Ohmaru, Masatune Yamaguchi,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) This paper proposes a method for the analysis of surface acoustic waves(SAWs) obliquely propagating on metallic gratings with finite thickness. When the aperture of the grating is assumed infinitely wide, wave field changes sinusoidally or exponentially toward the transverse direction. Thus, the method for the normal incidence case, which was reported previously by the authors, can be applicable to the purpose by specifying the wave number toward the transverse direction as a parameter. For the electrode rigion, the finite element method is employed whereas the spectrum domain analysis is applied for the substrate region. This combination enables very rapid calculation with sufficient accuracy.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) SAW / Metallic Grating / Transverse Mode / Finite Element Method / Spectrum Domain Analysis
Paper # US95-47
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Committee US
Conference Date 1995/9/22(1days)
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Registration To Ultrasonics (US)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Analysis of SAWs obliquely propagating on metallic gratings with finite thickness
Sub Title (in English)
Keyword(1) SAW
Keyword(2) Metallic Grating
Keyword(3) Transverse Mode
Keyword(4) Finite Element Method
Keyword(5) Spectrum Domain Analysis
1st Author's Name Ken-ya Hashimoto
1st Author's Affiliation Dept. of Elec. & Electron. Engrg., Chiba Univ.()
2nd Author's Name Gou Endoh
2nd Author's Affiliation Dept. of Elec. & Electron. Engrg., Chiba Univ. (Present Address)Fujitsu Ltd., Media Device Dev.
3rd Author's Name Makoto Ohmaru
3rd Author's Affiliation Dept. of Elec. & Electron. Engrg., Chiba Univ. : (Present Address) Graduate School, Tsukuba University
4th Author's Name Masatune Yamaguchi
4th Author's Affiliation Dept. of Elec. & Electron. Engrg., Chiba Univ.
Date 1995/9/22
Paper # US95-47
Volume (vol) vol.95
Number (no) 252
Page pp.pp.-
#Pages 6
Date of Issue