| Presentation | 1995/9/22 GHz-range Narrow-Gap IIDT Type Low Loss SAW Filters Using Anodic Oxidation Method Kazuhiko Yamanouchi, Toshikazu Terashima, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | GHz range low loss SAW filters are required for communication system, especially mobile telephone communication system. But to realize it, we require submicron electrode. In this paper, We reported GHz range low loss SAW filters by narrowgap IIDT (NG IIDT) using anodic oxidation method. To improve meander line electrode, a multilevel interconnection technology using ZnO thin films for insulator is suggested, and obtained low losses of 1.19dB at 2.0GHz. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Surface Acoustic Wave / IIDT / Low loss Filter / Anodic Oxidation / GHz Range |
| Paper # | US95-44 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 1995/9/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | GHz-range Narrow-Gap IIDT Type Low Loss SAW Filters Using Anodic Oxidation Method |
| Sub Title (in English) | |
| Keyword(1) | Surface Acoustic Wave |
| Keyword(2) | IIDT |
| Keyword(3) | Low loss Filter |
| Keyword(4) | Anodic Oxidation |
| Keyword(5) | GHz Range |
| 1st Author's Name | Kazuhiko Yamanouchi |
| 1st Author's Affiliation | Research Institute of Electrical Communication,Tohoku University() |
| 2nd Author's Name | Toshikazu Terashima |
| 2nd Author's Affiliation | Research Institute of Electrical Communication,Tohoku University |
| Date | 1995/9/22 |
| Paper # | US95-44 |
| Volume (vol) | vol.95 |
| Number (no) | 252 |
| Page | pp.pp.- |
| #Pages | 9 |
| Date of Issue | |