| Presentation | 1995/6/27 ZnO/Pyrex-glass Composite Thin Film Resonator Employing Air-gap Masamichi Sakamoto, Ken-Ya Hasimoto, Masatsune Yamaguchi, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper described ZnO/Pyrex-glass composite thin film bulk acoustic resonators employing an air-gap. Longitudinal vibartion of ZnO/Pyrex-glass structure possesses temperature stability with relatively large electromechanical coupling factor. The air-gap enables us to construct resonators on any kinds of substrates and to reduce device size. In UHF range, resonance Q of 590 is obtained experimentally. It is also shown that thickness of the diaphram can be reduced by adding Si layer and this technique is effective for increasing the resonance frequency. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | air-gap structure / zinc oxide / Pyrex-glass / thin film / piezoelectric resonator / diaphram |
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| Conference Information | |
| Committee | US |
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| Conference Date | 1995/6/27(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | ZnO/Pyrex-glass Composite Thin Film Resonator Employing Air-gap |
| Sub Title (in English) | |
| Keyword(1) | air-gap structure |
| Keyword(2) | zinc oxide |
| Keyword(3) | Pyrex-glass |
| Keyword(4) | thin film |
| Keyword(5) | piezoelectric resonator |
| Keyword(6) | diaphram |
| 1st Author's Name | Masamichi Sakamoto |
| 1st Author's Affiliation | Dept. of Elec. & Electron. Engrg., Chiba Univ.() |
| 2nd Author's Name | Ken-Ya Hasimoto |
| 2nd Author's Affiliation | Dept. of Elec. & Electron. Engrg., Chiba Univ. |
| 3rd Author's Name | Masatsune Yamaguchi |
| 3rd Author's Affiliation | Dept. of Elec. & Electron. Engrg., Chiba Univ. |
| Date | 1995/6/27 |
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| Volume (vol) | vol.95 |
| Number (no) | 132 |
| Page | pp.pp.- |
| #Pages | 6 |
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