Presentation | 1996/7/25 Conventional λ/4 Type Surface Acoustic Wave : Unidirectional Interdigital Transducers and Low-Loss Filters Kazuhiko Yamanouchi, Toshiyuki Kojima, Hiroyuki Odagawa, Yasuo Wagatsuma, Toshiyasu Meguro, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | A new fabrication technology for the conventional λ/4 IDT with λ/8 shift of a thin dielectric layer is proposed using the oblique angled photo-lithograpy process. These processes do not need a pricise alignment. Experimental result using a conventional λ/4 type unidirectional filters on 128゜Y-X LiNbO_3 substrate show 2.2dB and 2.6dB insertion loss and -20ppm/℃ temperature coefficient at 1GHz range. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Conventional unidirectional IDT / Oblique angled exposure / Low-loss SAW filter / Zero temperature characteristic |
Paper # | US96-26,EMD96-21,CPM96-44 |
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Committee | US |
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Conference Date | 1996/7/25(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Ultrasonics (US) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Conventional λ/4 Type Surface Acoustic Wave : Unidirectional Interdigital Transducers and Low-Loss Filters |
Sub Title (in English) | |
Keyword(1) | Conventional unidirectional IDT |
Keyword(2) | Oblique angled exposure |
Keyword(3) | Low-loss SAW filter |
Keyword(4) | Zero temperature characteristic |
1st Author's Name | Kazuhiko Yamanouchi |
1st Author's Affiliation | Research Institute of Elecrical Communication,Tohoku University() |
2nd Author's Name | Toshiyuki Kojima |
2nd Author's Affiliation | Research Institute of Elecrical Communication,Tohoku University |
3rd Author's Name | Hiroyuki Odagawa |
3rd Author's Affiliation | Research Institute of Elecrical Communication,Tohoku University |
4th Author's Name | Yasuo Wagatsuma |
4th Author's Affiliation | Research Institute of Elecrical Communication,Tohoku University |
5th Author's Name | Toshiyasu Meguro |
5th Author's Affiliation | Research Institute of Elecrical Communication,Tohoku University |
Date | 1996/7/25 |
Paper # | US96-26,EMD96-21,CPM96-44 |
Volume (vol) | vol.96 |
Number (no) | 179 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |