Presentation 1996/7/25
Conventional λ/4 Type Surface Acoustic Wave : Unidirectional Interdigital Transducers and Low-Loss Filters
Kazuhiko Yamanouchi, Toshiyuki Kojima, Hiroyuki Odagawa, Yasuo Wagatsuma, Toshiyasu Meguro,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) A new fabrication technology for the conventional λ/4 IDT with λ/8 shift of a thin dielectric layer is proposed using the oblique angled photo-lithograpy process. These processes do not need a pricise alignment. Experimental result using a conventional λ/4 type unidirectional filters on 128゜Y-X LiNbO_3 substrate show 2.2dB and 2.6dB insertion loss and -20ppm/℃ temperature coefficient at 1GHz range.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Conventional unidirectional IDT / Oblique angled exposure / Low-loss SAW filter / Zero temperature characteristic
Paper # US96-26,EMD96-21,CPM96-44
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Committee US
Conference Date 1996/7/25(1days)
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Registration To Ultrasonics (US)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Conventional λ/4 Type Surface Acoustic Wave : Unidirectional Interdigital Transducers and Low-Loss Filters
Sub Title (in English)
Keyword(1) Conventional unidirectional IDT
Keyword(2) Oblique angled exposure
Keyword(3) Low-loss SAW filter
Keyword(4) Zero temperature characteristic
1st Author's Name Kazuhiko Yamanouchi
1st Author's Affiliation Research Institute of Elecrical Communication,Tohoku University()
2nd Author's Name Toshiyuki Kojima
2nd Author's Affiliation Research Institute of Elecrical Communication,Tohoku University
3rd Author's Name Hiroyuki Odagawa
3rd Author's Affiliation Research Institute of Elecrical Communication,Tohoku University
4th Author's Name Yasuo Wagatsuma
4th Author's Affiliation Research Institute of Elecrical Communication,Tohoku University
5th Author's Name Toshiyasu Meguro
5th Author's Affiliation Research Institute of Elecrical Communication,Tohoku University
Date 1996/7/25
Paper # US96-26,EMD96-21,CPM96-44
Volume (vol) vol.96
Number (no) 179
Page pp.pp.-
#Pages 6
Date of Issue