Presentation | 1996/6/21 Preparation of PZT Thick Films by Using a Jet Printing System Y. Mihara, S. Kashu, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Ferroelectric PZT thick films were deposited on Ni coated substrates by aerosol jet printing method. Material powder was commercially used PZT fine particles which had mean diameter of 1.2μm. The shape of deposited films is 5 mm in width and its thickness can be controlled in the range of several to several tenth μm. The defect-free structure of the cross section of thick films was observed by SEM. After heat treatment of maximum temperature of 600℃ for 1 hr in air, properties of dielectrics, I-V and hysteresis were measured. Polyurea films of 0.1 to 0.3μm thickness with vapor deposition polymerization system have been laminated on PZT deposited films of 1 to 4 μm in thickness with aerosol jet printing system in order to increase its electrostatic capacity without reducing breakdown voltage. Aerosol jet printing system is expected to utilize as deposition of PZT thick films. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | aerosol / jet printing / PZT / ceramic fine particles / deposited film / polyurea |
Paper # | US96-20 |
Date of Issue |
Conference Information | |
Committee | US |
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Conference Date | 1996/6/21(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
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Assistant |
Paper Information | |
Registration To | Ultrasonics (US) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Preparation of PZT Thick Films by Using a Jet Printing System |
Sub Title (in English) | |
Keyword(1) | aerosol |
Keyword(2) | jet printing |
Keyword(3) | PZT |
Keyword(4) | ceramic fine particles |
Keyword(5) | deposited film |
Keyword(6) | polyurea |
1st Author's Name | Y. Mihara |
1st Author's Affiliation | Vacuum Metallurgical Co., Ltd.() |
2nd Author's Name | S. Kashu |
2nd Author's Affiliation | Vacuum Metallurgical Co., Ltd. |
Date | 1996/6/21 |
Paper # | US96-20 |
Volume (vol) | vol.96 |
Number (no) | 118 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |