Presentation 2000/8/22
SCE2000-15 / MW2000-79 The growth of YBa_2Cu_3O_<7-δ> thin film on Pt buffer layer
Kenji Taki, Takeo Suzuki, Youichi Enomoto, Katumi Suzuki,
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English) We are interested in high-temperature superconducting multi-chip module (HTS-MCM) substrate using high-temperature superconducting as high-speed high-frequency signal transmission lines interconnects between chips. HTS-MCM needs a technology to fabricate HTS thin film on the low dielectric constant material. We tried to deposit YBCO thin film on an amorphous synthetic quarts (SiO_2) substrate as the low dielectric constant material with a Pt thin film as a buffer layer. With controlling characteristics of the Pt thin film and with decreasing thickness of the Pt thin film, the growth of c-axis was accelerated and Tc(zero) of the YBCO thin film on SiO_2 substrates with the 140A-thick Pt buffer layer was 70K.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) low dielectric constant material / YBCO / Pt buffer layer
Paper # SCE2000-15,MW2000-79
Date of Issue

Conference Information
Committee SCE
Conference Date 2000/8/22(1days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair
Vice Chair
Secretary
Assistant

Paper Information
Registration To Superconductive Electronics (SCE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) SCE2000-15 / MW2000-79 The growth of YBa_2Cu_3O_<7-δ> thin film on Pt buffer layer
Sub Title (in English)
Keyword(1) low dielectric constant material
Keyword(2) YBCO
Keyword(3) Pt buffer layer
1st Author's Name Kenji Taki
1st Author's Affiliation Superconductivity Research Laboratory, ISTEC()
2nd Author's Name Takeo Suzuki
2nd Author's Affiliation Superconductivity Research Laboratory, ISTEC
3rd Author's Name Youichi Enomoto
3rd Author's Affiliation Superconductivity Research Laboratory, ISTEC
4th Author's Name Katumi Suzuki
4th Author's Affiliation Superconductivity Research Laboratory, ISTEC
Date 2000/8/22
Paper # SCE2000-15,MW2000-79
Volume (vol) vol.100
Number (no) 274
Page pp.pp.-
#Pages 5
Date of Issue