Presentation | 2000/8/22 SCE2000-15 / MW2000-79 The growth of YBa_2Cu_3O_<7-δ> thin film on Pt buffer layer Kenji Taki, Takeo Suzuki, Youichi Enomoto, Katumi Suzuki, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We are interested in high-temperature superconducting multi-chip module (HTS-MCM) substrate using high-temperature superconducting as high-speed high-frequency signal transmission lines interconnects between chips. HTS-MCM needs a technology to fabricate HTS thin film on the low dielectric constant material. We tried to deposit YBCO thin film on an amorphous synthetic quarts (SiO_2) substrate as the low dielectric constant material with a Pt thin film as a buffer layer. With controlling characteristics of the Pt thin film and with decreasing thickness of the Pt thin film, the growth of c-axis was accelerated and Tc(zero) of the YBCO thin film on SiO_2 substrates with the 140A-thick Pt buffer layer was 70K. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | low dielectric constant material / YBCO / Pt buffer layer |
Paper # | SCE2000-15,MW2000-79 |
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Conference Information | |
Committee | SCE |
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Conference Date | 2000/8/22(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Superconductive Electronics (SCE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | SCE2000-15 / MW2000-79 The growth of YBa_2Cu_3O_<7-δ> thin film on Pt buffer layer |
Sub Title (in English) | |
Keyword(1) | low dielectric constant material |
Keyword(2) | YBCO |
Keyword(3) | Pt buffer layer |
1st Author's Name | Kenji Taki |
1st Author's Affiliation | Superconductivity Research Laboratory, ISTEC() |
2nd Author's Name | Takeo Suzuki |
2nd Author's Affiliation | Superconductivity Research Laboratory, ISTEC |
3rd Author's Name | Youichi Enomoto |
3rd Author's Affiliation | Superconductivity Research Laboratory, ISTEC |
4th Author's Name | Katumi Suzuki |
4th Author's Affiliation | Superconductivity Research Laboratory, ISTEC |
Date | 2000/8/22 |
Paper # | SCE2000-15,MW2000-79 |
Volume (vol) | vol.100 |
Number (no) | 274 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |